Analytical Modeling of Cross-axis Coupling in Micromechanical Springs
نویسندگان
چکیده
Analytical models to describe coupling between different directions of motion are derived using energy methods and verified for the U-spring, crab-leg spring and the serpentine spring. Finite element analyses (FEA) are done for a range of spring dimensions for each spring type in order to verify the models and determine the validity range. The models for the serpentine spring are then incorporated into a macromodel for use in nodal simulation. Improvement in simulation time using the macromodel over beambased simulation is evaluated. Cross-axis coupling in an accelerometer structure is also simulated using this macromodel.
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